Preparation of ZnO films by R.F. magnetron sputtering

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Title:	Preparation of ZnO films by R.F. magnetron sputtering
Authors:	Ta Dinh Canh NGUYỄN NGỌC Long Nguyen Duy Phuong Nguyen Si Hai
Keywords:	ZnO film Magnetron
Issue Date:	2002
Publisher:	Communications in Physics
Series/Report no.:	Cv 07
Description:	12(2): 104-110
URI:	http://113.160.249.209:8080/xmlui/handle/123456789/12487
Appears in Collections:	Cơ sở dữ liệu Thư viện Hải dương học - VNIO's library catalogue (Bibliographic record, not full-text)

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