Preparation of ZnO films by R.F. magnetron sputtering

dc.contributor.author	Ta Dinh Canh
dc.contributor.author	NGUYỄN NGỌC Long
dc.contributor.author	Nguyen Duy Phuong
dc.contributor.author	Nguyen Si Hai
dc.date.accessioned	2015-11-24T06:03:10Z
dc.date.available	2015-11-24T06:03:10Z
dc.date.issued	2002
dc.identifier.uri	http://113.160.249.209:8080/xmlui/handle/123456789/12487
dc.description	12(2): 104-110	vi
dc.publisher	Communications in Physics	vi
dc.relation.ispartofseries	Cv 07
dc.subject	ZnO film	vi
dc.subject	Magnetron	vi
dc.title	Preparation of ZnO films by R.F. magnetron sputtering	vi
dc.type	Journal	vi